NEW 2023 EVG LITHOSCALE
Overview
Manufacturer: EVG
Model: Lithoscale
Year of Manufacture: 2023
Condition New-Never Used
Technical configuration:
• For maskless exposure of wafer sizes up to 300 mm
• High precision stage including contactless wedge error compensation
• Self calibration via integrated sensors
• Extensibility up to two (2) exposure heads in total for highest throughput
• Separate control unit
• EVG CIM Framework software
• Self diagnostics during machine start up, automatic initialization of all motors, position end switches, sensors and pneumatic
• Inspection available on request
• PC controlled operating environment
• Solid state drive and hard drive for high availability and reliability
• Supported layout format: GDSII
Find more here - https://www.ucymachines.com/
Contact us at - [email protected]
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