USED 1994 TAYLOR-HOBSON TALYSURF 120L

Gauge Type: Phase Grating Interferometer, 1 mN force nominal
Resolution: 12.8 nm @ 10 mm range
Range to Resolution Ratio: 780,000 : 1
Straightness Accuracy: .5 µm over 120 mm traverse.2 µm over any 20 mm traverse
Traverse Length: 4.72 in 120.00 mm
Traverse Speed: 0.39 in 10.00 mm
Measuring Speeds: 1.00 in 25.40 mm
Return Speed Maximum: 0.20 in 5.00 mm/sec
Measuring Range: 0.39 in 10.00 mm
Data Resolution: 0.000984252 in 0.25 µm
Machine Length: 15.59 in 396.00 mm
Machine Width: 5.00 in 127.00 mm
Machine Height: 7.68 in 195.00 mm