KDF 903 (PLP) 310mm CAPABLE
Overview
LOAD LOCK
(PALLET IS APPROXIMATELY 12X12″ FOR ANY SIZE PARTS)
WHOLE PALLET IS COATED, NO HOLDING FIXTURES NEEDED
NEW PROGRAMMABLE HMI/PLC SYSTEM
(MENU DRIVEN WITH OPERATOR AND PROCESS ENGINEER MODES)
NEW RF ETCH POWER SUPPLY WITH NEW MATCHING NETWORK
REBUILT CTI 8 CRYOPUMP WITH COMPRESSOR AND LINES
REBUILT DUAL STAGE MECHANICAL PUMP
(COVERED BY 1 YEAR WARRANTY)
NEW ELECTRONICS COVERED BY 1 YEAR WARRANTY
PROGRAMMABLE FEATURES INCLUDED:
AUTOMATIC LOAD AND UNLOAD OF PARTS INTO CHAMBER
POWER AND TIME SETTINGS FOR SPUTTER P/S FOR PROGRAM ON TOUCH SCREEN
POWER AND TIME SETTINGS FOR ETCH P/S FOR PROGRAM ON TOUCH SCREEN
MFC, CONTROL OF VACUUM LEVEL FOR PROGRAM ON TOUCH SCREEN
MENU TO SELECT NUMBER OF SCANS ON EACH TARGET AND ETCH PLATFORM (SELECTABLE SEQUENCE)
MENU TO REST PARTS ON ETCH PLATFORM (TO COOL BETWEEN TARGET SCANS)
SELECTION OF 10 RECIPE/PROGRAMS WITH ALL SETTINGS ABOVE ON TOUCH SCREEN
(REQUIRES 25% DEPOSIT, ALLOW 3 MONTHS FOR DEMONSTRATION, BALANCE PRIOR TO SHIPPING)
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