* Dual Oriel 8073 Exposure Heads
with 10″ collimating lenses, for up to 8″ 200mm wafers.
* Dual 1000 watt power supplies.
* Dual 1000 watt lamps.
* Estimated resolution 2-3 microns
* Note: system does not Include Mask/Substrate holders
please email your requirements for additional quote