Airco Temescal HRS 2550

AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM
3 TARGETS
AUTO/MANUAL VALVING
DIRECT DRIVE MECHANICAL PUMP
DIFFUSION PUMP
CAN BE UPGRADED WITH ROTATING FIXTURE TO HOLD (4) 8″ WAFERS
The Airco Temescal HRS 2550 is a sputtering system. It has 3 targets, auto/manual valving, direct drive mechanical pump,and diffusion pump. Also has a r/f power supply. Can Upgrade to rebuilt CTI-10 Cryopump head with compressor.
Technical Data
Dimensions: 16 inches high x 25.5-inch
diameter (406 mm x 647.7 mm)
Fixturing: carousel vertical mounted substrate holders, optional flip-flop capability
Capacity: (minimum) 64 2-inch (51 mm) wafers
Shielding: minimum-3-bounce
Substrate heat: maximum 3 kW
Number of cathodes: maximum of three Argon inlet bellows-sealed manual valve with metering capability
Vacuum cubicle (including electronics enclosure): 82.5 inches high (with cabinet
top console) x 64 inches wide x 40 inches deep (2100 mm x 1625 mm x 1025 mm)
Power supply (Including control consoles):
36 inches high x 25.5 inches wide x 25.5 inches deep (915 mm m x 650 mm x 650 mm)
Typical static deposition rates: 15,000
A/minute aluminum, 20,000 A/minute copper
Distribution: ± 5% with source masking
Target size: 8.25 inches x 3.56 inches (210 mm x 90 mm)
Operating voltage: -400 to -800V dc cathode potential (peak deposition rates at
-400 to -500V dc)
Maximum operating power level: 5 KW. 0.2 to 7A
Operating pressure: 1 x 10-2 to 1 x 10-3 torr
Cooling water: (0.5gpm at 20°C)per source
Output: 5 kW, current-adjustable from 0.2A
to 7A; voltage from 50V dc to 800V dc;
pressure-dependent
Duty cycle: 100%
Metering: output current, 0 to 1A, and 0 to
10A, dc scale; cathode-to-ground voltage,
0 to 1.5 kV dc; anode-to-ground voltage,
0 to 150V dc
Interlocks: power supply, cubicle doors,water, chamber lid and chamber pressure
Required service: 208/230V ac, 25A, 50/60 Hz, 3 phase
Ultimate vacuum: 10-8 torr range
Diffusion pump: 5300 liter/second, 10 inches high x 16-inch i.d
Mechanical pump: 35 cfm (1000 liter/second, dual stage
Cold trap: 4.5 liter capacity; 2600 square inch (1.67 m2) surface area
High vacuum valve: 16-inch (406 mm) i.d., bellows-sealed
High vacuum bypass valve: 3-inch (75 mm) i.d., variable conductance
Famine valve and roughing valve: 2-inch (51 mm) i.d
Valve actuation: electropneumatic (all vacuum valves)
Valve sequencing: manual and automatic