Sloan/Veeco Dektak IIA
Overview
Specifications
Measurement Display Range … 200 A to 655,000 A
(20nm to 65,000nm)
Vertical Resolution … 5A (.5nm)
Scan Length … 50 microns to 30mm
Scan time … .4 to 65 seconds (depending on
scan length and speed range)
Leveling … . Automatic or Semi-Automatic
Stylus (standard) . Diamond, 12.5 micron radius
Stylus Tracking Force …10 to 50mg (field adjustable)
Maximum Sample Thickness 20mm (.75 inch)
Stage Diameter … 127mm(5 inches)
Stage Translation (from center)
X-Axis … .±10mm (.4 inch)
Y -Axis … .±10mm,-70mm (.4 and-2.8 inches)
Magnification -Microscope: 70X; Video Camera: 90X
Thermal Printer … 15 seconds/printout
Printout Size … 11cm x 17cm (4.3 x 6.75 inches)
Weight (Includes tools and accessories)
Control Console and Printer … 22.2kg (49 Ibs)
Scanning Head … 20.41kg (45 lbs)
Video Camera … 1.1kg (2.5 lbs)
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