Edwards 306 Sputtering System
Overview
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The Edwards 306 Sputtering System is a vacuum evaporator.
It has a stainless steel chamber.
It’s 12″ diameter X “10.5 tall.
This vacuum evaporator includes a view port, 500 L/S turbo pump, dual sputtering guns, a glow discharge (for soft etch), micrometer adjusted gas input, pirani gauge, advanced energy mdx digital DC sputtering supply and manual valving.
It has an ION Gauge to measure vacuum level at 10-7 (installed), mass flow control for 2 gages and simultaneous sputtering capability.
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