150mm PROBE STATION (AVAILABLE WITH 6″ HOT CHUCK)
INCLUDES B&L STEREO ZOOM 7 OPTICS, OR CAN BE UPGRADED TO
MICROZOOM HIGH POWER OPTICS
S-1150 FEATURES:
Vacuum and wiring Manifold: Located on both sides of the platen,
each manifold has six vacuum ports
to accommodate vacuum base micropositioners. Also, six color-coded electrical jacks are wired to the
corresponding colored banana jacks at the rear of the probe station.
Base Plate Large black anodized base plate machined from 5/8″ aluminum stock.
Stage Control Knobs: Knobs move wafer chuck stage a full 5″ in both the X and Y direction at a speed of four knob revolutions per inch.
Rotation Knob: This knob rotates the 5″ chuck a full 360 degrees.
Chuck Z Motion: This knob raises and lowers the chuck to the desired probing height. The chuck has a total movement of 1 1/2″.
Vacuum Toggle Switch
Platen Lift Lever The lever drives the four point platen lift and lifts the platen, maintaining a horizontal plane. The platen may be stopped at any point of the1/4″ travel.
Nickel-chrome Plated Steel Platen: The large 3/8″ steel platen will accomidate up to 12 vacuum-base or magnetic base micropositioners.
5″ Nickel-chrome Plated Brass Chuck: The chuck is plumbed for vacuum and has a connection for
grounding. The chuck has also been ground flat to + or – .001 inches.
Vacuum Toggle Switch: This toggle controls the vacuum to all vacuum ports for vacuum hold-down micropositioners.
Microscope Stage: Easily accessable crank-style knob allows 2 inches of smooth X-Y microscope
movement.
