The Edwards E2M5 pump speed is 4 CFM at 60Hz.
It’s flange is NW25 with 15 mm nozzle alternative.
It’s maximum inlet pressure for water vapor is 11 torr.
The motor runs at 0.37 kW at 60Hz.
The oil capacity minimum is 0.42 liter and the maximum is 0.55 liter.
The weight of this pump is 43 lbs.