KLA/TENCOR P2
Scan Length: 210mm. (8″)
Scan Speed: 1 um/sec to 25mm/sec.
Vertical range: +/- 6.5um at 1A resolution & +/- 150um at 25A.
Vertical Linearity: 10A below 2000A, +/- .5% above 2000A.
Horizontal Resolution: 100A at 1 um/second
Scan speed up to 5000 data points per scan depending on scan speed and length.
