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17″ DIAMETER X 35″ TALL CHAMBER
(FOR 300mm WAFER OR INDIUM EVAPORATION)
CTI 8 CRYOPUMP (REBUILT)
CHOOSE ELECTRON BEAM OR THERMAL SOURCE WITH POWER SUPPLY
VALVES REBUILT
DUAL STAGE VACUUM PUMP (REBUILT)
(NEW TOUCH SCREEN VALVE CONTROLLER, AND NEW VACUUM SENSORS COVERED BY 1 YEAR WARRANTY)
